Dec 5, 14:30-15:20, Hall 4（Room 1）
Dec 6, 13:30-14:20, Hall 4（Room 1）
Dec 7, 12:30-13:20, Hall 4（Room 1）

Seminar title: What semiconductor industry expects in EtherCAT technology and EtherCAT semi device profile

EtherCAT Technology Group presents the latest developments including semiconductor device profile specification as well as EtherCAT basic technology. The advantages of EtherCAT as a control network for semiconductor manufacturing will be presented by the guest speaker from Tokyo Electron Device.