MARS CO.,LTD. developed Fan Filter Unit in order to control the particle and contamination in the clean room of semiconductor and precise industrial factory. It not only filters the particle, contamination or VOCs over 99.999% through upgrading filter media but also maintains stable quality of production process by applying automatic differential pressure adjustment function in EFEM. Also it improves productivity by upgrading fan performance. MARS has Certifications about Fan Status Monitoring System, Cooling Fan System and Chamber Wall Temperature Control System, etc. Based on these Technologies, MARS can install Clean Room, Clean Bench and Clean Booth. The company provides the customized products as customers needs. MARS is in business with major semiconductor companies in South Korea and Asia.