LINTEC

LINTEC supplies mass flow controllers (MFCs) and liquid vaporization systems for various types of gases and liquids used in the CVD and ALD systems that are used in semiconductors, FPDs and solar cells etc. All LINTEC MFCs use digital electronics and original mass flow sensors, giving fast response and high precision. As LINTEC MFCs use a digital interface, it is possible to control the flow of fluid using digital communication through the RS-485 and the DeviceNet.