| |
|
|
3:00 pm - 3:20 pm
|
EtherCAT Based Temperature Control System for Front End Wafer Processing (FEWP) Tools
|
|
Abstract: |
Watlow has added
EtherCAT communication capabilities to
its EZ-ZONE® RM (Rail Mount) controller
platform that supports traditional TC
and RTD sensors as well as RF-immune
optical pedestal sensors. Watlow’s RMZ,
an integrated EtherCAT based control
platform, offers the scalability,
versatility, and performance required
for the semiconductor industry. RMZ
implements the ETG.5003.2060
Semiconductor Standard. This allows easy
integration of chuck, chamber, lid, and
fore-line heater control with the tool’s
master control system. The flexibility
combined with optical sensing makes RMZ
the perfect temperature control solution
for FEWP processing tools. |
Speaker: |
Stan Breitlow, Principle Engineer / Semiconductor System Designers, Watlow |
 |
Stan Breitlow has been with Watlow for
22 years. He chaired the ETG Temperature
Controller TWG for Semiconductor Working
Group producing the ETG.5003.2060
standard. He was lead firmware developer
on many Watlow controllers including the
EZ-ZONE product family. He is a graduate
with a BSEE from the University of
Minnesota. |
| |
|
| |
|
|
|
|
|
Date and Venue:
March 18, 2014
Carlton Hotel, Singapore
Sponsors & Partner:
|
