Maruyama Chillers

Maruyama Chillers designs, manufactures, and sells refrigeration-based, water-cooled, recirculating chillers and heat exchangers used for temperature control of closed-looped systems on semiconductor wafer fabrication equipment, such as etch process modules and deposition tools. Units are designed for use with a variety of systems using cooling liquids such as deionized water, inert fluids, and ethylene glycol/water. Coolant temperature control ranges are from minus 50°C to 200°C. Customized designing and manufacturing for specific chiller and heat exchanger applications are also offered. Maruyama Chillers is located near Silicon Valley supporting fab equipment manufacturers and is the U.S. subsidiary of Maruyama Manufacturing with headquarters and factory located in Tokyo, Japan.