SubDevices > Semiconductor Industry
CS系列质量流量控制器&流量计
CS系列产品采用了国际领先的技术,申报并获得66项国家专利,其中PCT2项,发明专利24项。CS 系列产品的各项技术指标均严格按照SEMI标准,相对于模拟产品具有精度高,响应快,使用便捷，可实现功能多、易于通讯、扩展性和可兼容性强等优点。CS系列产品已被广泛应用于半导体。太阳能、燃料电池、真空、分析仪器、光电、制气、石化、医疗、航空电力等行业。
High Accuracy and Fast Response
The accuracy of the CS has been improved to ±1.0% of S.P., and the most advanced models have a reduced response time of less than 0.8 sec.
Low Zero Drift and Temperature Coefficient
The invention of new sensor technology enables the device to maintain stability and withstand temperature fluctuations. Without an auto-zero amplifier, the expected zero drift is less than 0.6% F.S./year, and the temperature coefficient is less than 0.02% F.S./℃ (zero), 0.05% F.S./℃ (span).
Miscellaneous Functions
Powerful customer software comes standard with each model, while additional functions such as multi-gas, multi-range, auto-zero, alarms, soft start, and delay are available as customer selections.
获得验证的产品
The following device family is certified by an official EtherCAT Test Center:
- CSxxxtgggvrrrrEffsmd
xxx: 310, 320
t: A, C, D
ggg: 043, 007, 010, 011, 012, 017, 022, 001, 005, 013, 002, 029, 016, 026, 027, 015, 193, 031, 143, 102, 108, 088, 039, 067, 147, 110, 032, 114, 121, 006, 008, 004, 035, 079, 070, 048, 058, 101, 063, 028, 042, 038, 054, 068, 069, 089, 093, 104, 117, 240, 176, 136, 112, 009, 025, 059, 019, 014, 018, 113
v: O, C, N
rrrr: 001C, 002C, 003C, 005C, 010C, 020C, 030C, 050C, 100C, 200C, 300C, 500C, 001L, 002L, 003L, 005L, 010L, 020L, 030L, 050L
ff: AA, GG, JJ, BB, CC, HH, MM, UU, SA, SC, SW, RR, VV, TT, XX
s: V, M
m: H, E, U, D
d: -, S
- CS200tgggvrrrrEffsmd
t: A, C, D
ggg: 043, 007, 010, 011, 012, 017, 022, 001, 005, 013, 002, 029, 016, 026, 027, 015, 193, 031, 143, 102, 108, 088, 039, 067, 147, 110, 032, 114, 121, 006, 008, 004, 035, 079, 070, 048, 058, 101, 063, 028, 042, 038, 054, 068, 069, 089, 093, 104, 117, 240, 176, 136, 112, 009, 025, 059, 019, 014, 018, 113
v: O, C, N
rrrr: 002C, 003C, 005C, 010C, 020C, 030C, 050C, 100C, 200C, 300C, 500C, 001L, 002L, 003L, 005L, 010L, 020L, 030L, 050L
ff: AA, GG, JJ, BB, CC, HH, MM, UU, SA, SC, SW, RR, VV, TT, XX
s: V, M
m: H, E, U, D
d: -, S
- CS230tgggvrrrrEffsmd
t: A, C, D
ggg: 043, 007, 010, 011, 012, 017, 022, 001, 005, 013, 002, 029, 016, 026, 027, 015, 193, 031, 143, 102, 108, 088, 039, 067, 147, 110, 032, 114, 121, 006, 008, 004, 035, 079, 070, 048, 058, 101, 063, 028, 042, 038, 054, 068, 069, 089, 093, 104, 117, 240, 176, 136, 112, 009, 025, 059, 019, 014, 018, 113
v: O, C, N
rrrr: 050L, 100L, 150L, 200L, 250L, 300L
ff: AA, GG, JJ, BB, CC, HH, MM, UU, SA, SC, SW, RR, VV, TT, XX
s: V, M
m: H, E, U, D
d: -, S
