PCG55x Pirani Capacitance Diaphragm Vacuum Gauge

The INFICON Pirani Capacitance Diaphragm Gauge (PCG55x) combines the INFICON Pirani technology with the advantages of a ceramic capacitance diaphragm sensor in a single product. In the measurement range between 10 mbar and atmosphere the capacitance diaphragm technology provides gas-type independent, highly accurate values for reliable pressure measurement. The PCG55x offers also a variety of features which allows the right product configuration for the demanded application.

BENEFITS

• Gas type independent above 10 mbar – allows safe venting with any gas mixture
• High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
• Versatile of mounting orientation – provides engineering freedom in tool design
• Available with Tungsten (PCG550) or Nickel (PCG552) filament or with a fully ceramic coated (PCG554) sensor unit for highly corrosive applications
• Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
• Selectable output signal for easy integration
• Optional atmospheric switch, display and several fieldbus interfaces available (besides EtherCAT, other leading fieldbus systems are supported)
• Compliance & standards: CE, EN, UL, CSA, RoHS

TYPICAL APPLICATIONS

• Load Lock control
• Fore vacuum pressure measurement
• Safety circuits in vacuum systems
• General vacuum measurement and control in the medium and rough vacuum range