Maruyama Manufacturing (Maruyama Chillers)

Maruyama Manufacturing Corporation designs, manufactures, and sells refrigeration-based, water-cooled, recirculating chillers and heat exchangers used for temperature control of closed-looped systems on semiconductor wafer fabrication equipment, such as etch process modules and deposition tools. Units are designed for use with a variety of systems using cooling liquids such as deionized water, inert fluids, and ethylene glycol/water. Coolant temperature control ranges are from minus 50°C to 200°C. Customized designing and manufacturing for specific chiller and heat exchanger applications are also offered. Maruyama Manufacturing Corporation with headquarters and factory is located in Tokyo, Japan supporting fab equipment manufacturers its service centers are located in U.S., Taiwan, China and Singapore.