GF100 Series EtherCAT Mass Flow Controllers

The fastest and most accurate MFCs have now been enhanced with the speed of EtherCAT for the Semiconductor industry.

The GF100 Series MFCs from Brooks Instrument feature:

  • Embedded diagnostics leverage real-time EtherCAT data acquisition capabilities
  • Ultra-stable flow sensor (≤ 0.15% of S.P. drift per year) enables tighter low set point accuracy and reduces maintenance requirements
  • Improved valve shutdown (≤ 0.15% of bin range) reduces valve leak-by to reduce first wafer effects
  • Newly enhanced pressure transient insensitivity reduces crosstalk sensitivity for consistent mass flow delivery


GF100 Series EtherCAT Mass Flow Controllers


Brooks Instrument

Brooks Instrument, LLC

Further Information