Edge - CDG045D2 & CDG100D2 High Precision Vacuum Gauge

The INFICON Edge CDG045D2 & CDG100D2 Capacitance Diaphragm Gauge is a high accurate vacuum measurement instrument designed for harsh manufacturing environments. The proven temperature controlled corrosion resistant ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. The Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process byproducts. Advanced electronics offer the user a wide range of suitable filters for all applications and the option of an EtherCAT fieldbus interface. The INFICON Edge CDG045D2 & CDG100D2, with it’s innovative heating concept is the smallest and most accurate vacuum measurement instrument of it's kind.


  • Low tool space required
  • Smallest instrument of it’s class
  • Flexible integration
  • EtherCAT fieldbus
  • Long lifetime
  • Proven ceramic sensor
  • High precision measurement
  • 80ppm / year full scale stabilty


  • PVD, CVD, Etch
  • Quality control, reference vacuum
  • General high temperature vacuum applications
  • Load lock
  • Oxidation
  • Analytical