CDG100D, 160D, 200D SKY® Capacitance Diaphragm Vacuum Gauges

The INFICON heated CDG Capacitance Diaphragm Gauge line is designed for stable long time performance in harsh manufacturing environments. The temperature controlled corrosion resistant ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. An innovative heating concept reduces power consumption. The heated CDG Capacitance Diaphragm Gauge comes with a safe to touch surface even for the 200°C version. Advanced electronics offer the user a wide range of suitable filters yielding solutions for all applications and a choice of fieldbus interfaces. A unique sensor shield (patents granted) protects the gauge from undesired process byproducts. A total Alumina coating immunizes the product against chemical attack.

BENEFITS

• Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
• Easy integration, wide variety of full scales, flanges and several interfaces (besides EtherCAT, other leading fieldbus systems are supported), standard with two set points
• Easy one push button or remote signal zero command, zero offset adjustable
• Diagnostic port for quick service and maintenance
• Two year warranty, longer life time with heating concept and gauge protection
• No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
• Compliance & standards: CE, EN, UL, SEMI, RoHS

TYPICAL APPLICATIONS

• High temperature coating
• Dry etch
• Sterilization
• General high temperature vacuum applications
• Oxidation
• CVD, PVD, LPCVD, and other semiconductor processes