Augent® OPG550

The INFICON Augent™ Optical Plasma Gauge OPG550 is an intelligent solution for vacuum monitoring. Augent™ OPG550 combines two sensor technologies into one compact device for gas type monitoring from 1 × 10-7 to 5 mbar and to measure total pressure from atmosphere to 1 × 10-7 mbar at the same time. Augent™ OPG550 is protected by an integrated Pirani sensor to switch off plasma above 20 mbar. In the measurement range between 1 × 10-7 and 5 mbar the gauge allows the detection of gas composition.

ADVANTAGES

• High speed chamber leak tests
• Increase of productivity and yield
• Long life time, no filament burns, air inrush protection
• Withstand process chemistry
• Smart algorithm for easy integration
• Compact design and small footprint
• Reliable and fast start up

APPLICATIONS

• Chamber leak check, faster RoR (rate of rise) test
• Leak check to find internal leaks from gas supply lines
• Real time end point control
• Gas type and gas concentration control