Augent® OPG550

The INFICON Augent™ Optical Plasma Gauge OPG550 is an intelligent solution for vacuum monitoring. Augent™ OPG550 combines two sensor technologies into one compact device for gas type monitoring from 1 × 10-7 to 5 mbar and to measure total pressure from atmosphere to 1 × 10-7 mbar at the same time. Augent™ OPG550 is protected by an integrated Pirani sensor to switch off plasma above 20 mbar. In the measurement range between 1 × 10-7 and 5 mbar the gauge allows the detection of gas composition.

ADVANTAGES

  • High speed chamber leak tests
  • Increase of productivity and yield
  • Long life time, no filament burns, air inrush protection
  • Withstand process chemistry
  • Smart algorithm for easy integration
  • Compact design and small footprint
  • Reliable and fast start up

APPLICATIONS

  • Chamber leak check, faster RoR (rate of rise) test
  • Leak check to find internal leaks from gas supply lines
  • Real time end point control
  • Gas type and gas concentration control

 

 

 

Augent® OPG550

企業

INFICON

INFICON AG

Conformance tested

公式認証テスト合格製品